| Facility: | Chair of Materials Science and Nanotechnology | Partner: | TU Dresden |
| Location: | MBZ 024 |
Thin film deposition machine
QCM Inputs: 2 (4 optional)
Measurement Frequency Range: Adjustable: 1.0 MHz minimum - 6.5 MHz maximum
Frequency Resolution (1): ± 0.012 Hz
Thickness & Rate Resolution/Measurement (2): ±0.015 Å
Frequency Stability: ± 2 ppm total, 0 to 50C
Measurement Interval: 0.10 to 1.0 s (adjustable)
Rate Display: 0.01 Å/sec
Storage: 100 processes, 1000 layers, 50 films
Control Outputs: 2 (4 optional)
Output Signal: ± 0 to 10 VDC, 15 bits
Digital Inputs/Relays: 8/8 (16/16 optional)
Digital Inputs: 5 VDC non-isolated
Relays: SPST Form 1A, 30V, 2A max
Interface(s): Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control: Optional (IPN 782-900-017)
| Facility: | Chair of Materials Science and Nanotechnology | Partner: | TU Dresden |
| Location: | MBZ 024 |
Thin film deposition machine
QCM Inputs: 2 (4 optional)
Measurement Frequency Range: Adjustable: 1.0 MHz minimum - 6.5 MHz maximum
Frequency Resolution (1): ± 0.012 Hz
Thickness & Rate Resolution/Measurement (2): ±0.015 Å
Frequency Stability: ± 2 ppm total, 0 to 50C
Measurement Interval: 0.10 to 1.0 s (adjustable)
Rate Display: 0.01 Å/sec
Storage: 100 processes, 1000 layers, 50 films
Control Outputs: 2 (4 optional)
Output Signal: ± 0 to 10 VDC, 15 bits
Digital Inputs/Relays: 8/8 (16/16 optional)
Digital Inputs: 5 VDC non-isolated
Relays: SPST Form 1A, 30V, 2A max
Interface(s): Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control: Optional (IPN 782-900-017)
